Beneq’s latest atmospheric pressure nFOG wet coating technology uses a unique contact-free deposition method to coat the most sensitive substrates, along with those of different thicknesses, shapes or size variations. Typical coating uniformity is better than ±3%; substrate size can be up to meter scale. The aerosol-based process works with a wide range of liquid source materials, including water- or alcohol-based solutions or colloids. Typical dry coating thicknesses range from 10–500 nm.
Aerosol Coating System ACS 200
Beneq’s Aerosol Coating System ACS 200 is designed for R&D and fast sampling. As the deposition system has no moving parts, the process is robust and repeatable. The majority of material used in the process can be recycled, therefore enabling a uniquely high material yield of up to 95%. Additionally, the modular approach allows scaling up to be simple and efficient. “Our new nFOG technology can be used to scale most sol-gel or other liquid-based coating processes, from lab scale into full industrial scale, while maintaining the quality of spin or dip coating,” says Sampo Ahonen, CEO, Beneq.
For researchers, Beneq offers ACS 200 lab scale equipment that combines fast sampling with low material consumption. It accommodates up to 200 mm round wafers or other substrate materials. Before scaling up, customers can rent a pilot-scale test system that processes substrates up to 800 × 1400 mm. For full industrial production, Beneq provides turnkey solutions or an integrated coating system within an existing production line.
About Beneq
Beneq, leading supplier of production and research equipment for thin film coatings, is also the world’s premier manufacturer and developer of thin film electroluminescent (TFEL) displays. Beneq equipment and thin film experience is used for improving the efficiency of crystalline silicon and thin film solar cells, enhancing the durability of organic electronics and protecting silver from tarnishing. In addition to process equipment, Beneq also offers full thin film coating services.
